Bruker Corporation Unveils Dektak Pro: The Next-Generation Stylus Profilometer

Bruker Corporation announced the launch of the Dektak Pro stylus profilometer, marking a significant advancement in their industry-leading Dektak product line. This next-generation benchtop system incorporates over 55 years of innovation and is designed to meet the rigorous demands of semiconductor applications, featuring an expanded measurement area of up to 200 mm for full-sample access. The Dektak Pro not only enhances user experience and measurement accuracy but also reduces the time required to obtain results, making it an essential tool for R&D, process development, and quality assurance across various industrial and research markets.

The Dektak Pro stands out for delivering highly accurate and precise data, boasting the highest resolution and lowest noise floor of any commercially available stylus profilometer. Its advanced measurement and analysis technologies ensure maximum repeatability and accuracy, allowing for single-nanometer step height measurements and better than 4 Å repeatability. Every aspect of the measurement process has been accelerated with the Dektak Pro, utilizing direct-drive scan stage technology to minimize downtime between scans and 64-bit parallel processing in the Vision64 software for rapid data processing. Additional features include a new algorithm that brings nearly the entire field of view into focus in the optical live image, facilitating the easy location of features of interest, as well as automated step height analysis routines to enhance consistency and reduce potential user errors.

Industry experts have expressed enthusiasm for the Dektak Pro’s capabilities. Dr. Nithi Atthi, Fab Manager at the Thai Microelectronics Center (TMEC), highlighted the tool’s advancements in meeting the stringent metrology requirements for high aspect ratio microstructures in MEMS applications. Samuel Lesko, Senior Director and General Manager of Bruker’s Tribology, Stylus and Optical Metrology Business, emphasized the Dektak’s reputation in the industry, noting the continued global demand for stylus profiling technology. With the Dektak Pro, Bruker aims to elevate measurement capability and operational ease while retaining the reliability that has made the Dektak name synonymous with excellence in stylus profiling.